In-situ Device Fabricator is a product line developed for smart and efficient in-situ device fabrication.
It can integrate with different FUTEC single-core evaporators to achieve patterned device fabrication or film growth. Customized mask patterns can enable different transport measurements. Mask holders and sample holders can be independently replaced in-situ. It can accommodate STM, ARPES, MBE standard flag-type holders, Elmitec LEEM holders, or customized sample/mask holders.
Device Electrode Width: >= 10 μm
Device Electrode Gap: >= 10 μm